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公开(公告)号:US11214870B2
公开(公告)日:2022-01-04
申请号:US15990051
申请日:2018-05-25
发明人: Jaihyuk Choi , Jong-hoon Park , Kyungjoo Min , Wonwoong Park , Sukwon Jung , Hyunwoo Joo , Myungsoo Huh
IPC分类号: C23C16/458 , C23C16/44 , H01J37/32 , C23C16/50 , H01L21/687 , C23C16/509 , C23C16/455 , H01R9/16 , H01R9/00 , H01L21/02
摘要: A chemical vapor deposition (CVD) system may include a chamber, a susceptor provided in the chamber to support a substrate, a gas distribution part provided over the susceptor, a first ground strap bar provided on a bottom inner surface of the chamber and electrically connected to the chamber, a second ground strap bar provided on a bottom surface of the susceptor and electrically connected to the susceptor, and a plurality of ground straps electrically connected to the first and second ground strap bars, each of the plurality of ground straps including two opposite portions that are fastened to the first and second ground strap bars, respectively.
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公开(公告)号:US20190211445A1
公开(公告)日:2019-07-11
申请号:US16160757
申请日:2018-10-15
发明人: Seokjin Ko , Myungsoo Huh , Sukwon Jung , Dongkyun Ko , Inkyo Kim
CPC分类号: C23C16/4405 , C23C16/46
摘要: An apparatus for manufacturing a display apparatus includes: a chamber; a head unit configured to supply a process gas and a cleaning gas to an inside of the chamber; which has a storage space where the process gas or the cleaning gas is temporarily stored, and including a nozzle connected to the storage space and configured to guide the process gas or the cleaning gas from the storage space to the inside of the chamber; a susceptor unit arranged to face the head unit and on which a substrate is placeable; a cleaning gas supply unit connected to the head unit and configured to plasmarize the cleaning gas and supply the cleaning gas that is plasmarized to the head unit; and a cleaning gas ejection unit connected to the cleaning gas supply unit and configured to supply the cleaning gas to at least two portions of the storage space.
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公开(公告)号:US10316219B2
公开(公告)日:2019-06-11
申请号:US15647259
申请日:2017-07-12
发明人: Byungwook Ahn , Kikyung Youk , Sukwon Jung , Jeongho Hwang , Jongdeok Park , Seungchan Lee , Intae Son , Junhyup Lee
IPC分类号: G06F3/041 , C09J5/06 , H05K5/00 , H05K5/03 , C09J11/08 , B32B7/12 , B32B5/16 , B32B27/06 , C09J11/06
摘要: A thermally releasable adhesive member including a base resin and microcapsules dispersed and disposed in the base resin. The microcapsule includes a core part, a shell part wrapping the core part, and an organic solvent disposed in the core part, and an average diameter of the microcapsules is in a range from about 50 nm to about 500 nm. The adhesive member may maintain high optical transmittance and may be easily detached at a high temperature.
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4.
公开(公告)号:US20190019652A1
公开(公告)日:2019-01-17
申请号:US15994486
申请日:2018-05-31
发明人: Jong-hoon Park , Sukwon Jung , Hyunwoo Joo , Jaihyuk Choi , Kyungjoo Min , Wonwoong Park
IPC分类号: H01J37/32 , C23C16/44 , C23C16/505 , H01L51/56
摘要: A chemical vapor deposition apparatus includes a chamber, a susceptor supporting a substrate, a backing plate to which power is applied, a diffuser providing a deposition gas, and a first insulator. The first insulator may include a first portion covering a top surface of the backing plate, and a second portion assembled with the first portion and covering a sidewall of the backing plate.
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公开(公告)号:US20170373125A1
公开(公告)日:2017-12-28
申请号:US15632058
申请日:2017-06-23
发明人: Kikyung Youk , Seungchan Lee , Jeehun Lim , Wonjoon Choi , Jongdeok Park , Byungwook Ahn , Sukwon Jung , Jeongho Hwang
CPC分类号: H01L27/3262 , H01L27/3276 , H01L51/0097 , H01L51/5253 , H01L51/5281 , H01L51/56 , H01L2251/5338
摘要: A flexible display device includes: a panel portion including a display area and a pad area; a window disposed over the panel; an adhesive layer disposed between the window and the panel portion; and a protection film disposed between the pad area and the adhesive layer.
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6.
公开(公告)号:US20160133873A1
公开(公告)日:2016-05-12
申请号:US14811729
申请日:2015-07-28
发明人: Myungsoo Huh , Sunghun Key , Sungchul Kim , Cheollae Roh , Sukwon Jung , Hyunwoo Joo , Jaihyuk Choi
CPC分类号: H01L51/5256 , C23C16/042 , C23C16/345 , C23C16/45565 , C23C16/505 , H01J37/32091 , H01J37/3244
摘要: A display device and an apparatus and method for manufacturing the same are disclosed. The display device includes: a substrate; a display unit formed on the substrate; and an inorganic layer formed on the display unit, wherein a water vapor transmission rate (WVTR) of the inorganic layer is 5×10−5 g/m2 day or less. The apparatus for manufacturing a display device includes: a chamber; a shower head for spraying a mixed gas into the chamber; a plasma generation unit for forming plasma from the mixed gas; a susceptor facing the shower head and on which a substrate is seated; and a power supply unit electrically connected to the plasma generation unit, wherein a frequency of a current supplied from the power supply unit to the plasma generation unit is between about 27 MHz and about 42 MHz.
摘要翻译: 公开了一种显示装置及其制造方法。 显示装置包括:基板; 形成在所述基板上的显示单元; 以及形成在所述显示单元上的无机层,其中所述无机层的水蒸气透过率(WVTR)为5×10 -5 g / m 2·天以下。 用于制造显示装置的装置包括:腔室; 用于将混合气体喷射到所述室中的淋浴头; 用于从所述混合气体形成等离子体的等离子体产生单元; 面向淋浴喷头的感受器,其上安置有基底; 以及电连接到所述等离子体产生单元的电源单元,其中从所述电源单元提供给所述等离子体产生单元的电流的频率在约27MHz至约42MHz之间。
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7.
公开(公告)号:US20220238306A1
公开(公告)日:2022-07-28
申请号:US17718047
申请日:2022-04-11
发明人: Jong-hoon Park , Sukwon Jung , Hyunwoo Joo , Jaihyuk Choi , Kyungjoo Min , Wonwoong Park
IPC分类号: H01J37/32 , C23C16/44 , H01L51/56 , C23C16/505 , C23C16/455 , C23C16/509
摘要: A chemical vapor deposition apparatus includes a chamber, a susceptor supporting a substrate, a backing plate to which power is applied, a diffuser providing a deposition gas, and a first insulator. The first insulator may include a first portion covering a top surface of the backing plate, and a second portion assembled with the first portion and covering a sidewall of the backing plate.
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公开(公告)号:US10908648B2
公开(公告)日:2021-02-02
申请号:US16882391
申请日:2020-05-22
发明人: Jaihyuk Choi , Sukwon Jung , Myungsoo Huh
摘要: Disclosed is a foldable display apparatus in which a crack prevention layer is disposed on a surface of a display panel. The crack prevention layer includes thin film pattern portions disposed along a folding axis of the foldable display apparatus.
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公开(公告)号:US10664015B2
公开(公告)日:2020-05-26
申请号:US15869481
申请日:2018-01-12
发明人: Jaihyuk Choi , Sukwon Jung , Myungsoo Huh
摘要: Disclosed is a foldable display apparatus in which a crack prevention layer is disposed on a surface of a display panel. The crack prevention layer includes thin film pattern portions disposed along a folding axis of the foldable display apparatus.
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公开(公告)号:US10361263B2
公开(公告)日:2019-07-23
申请号:US15949614
申请日:2018-04-10
发明人: Jaihyuk Choi , Sukwon Jung , Myungsoo Huh , Seok-jin Ko , Hyunwoo Joo
IPC分类号: H01L27/32 , H01L27/12 , H01L29/786
摘要: Provided is a display apparatus. The display apparatus includes a base substrate, a first transistor disposed on the base substrate and including a first semiconductor layer including a first layer and a second layer disposed to come into contact with a first layer and including a compound made of at least two materials of a Group IV elements, a first control electrode overlapping the first semiconductor layer, a first input electrode connected to the first semiconductor layer, and a first output electrode connected to the first semiconductor layer, a second transistor and an organic light emitting diode.
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