APPARATUS AND METHOD OF MANUFACTURING DISPLAY APPARATUS

    公开(公告)号:US20190211445A1

    公开(公告)日:2019-07-11

    申请号:US16160757

    申请日:2018-10-15

    IPC分类号: C23C16/44 C23C16/46

    CPC分类号: C23C16/4405 C23C16/46

    摘要: An apparatus for manufacturing a display apparatus includes: a chamber; a head unit configured to supply a process gas and a cleaning gas to an inside of the chamber; which has a storage space where the process gas or the cleaning gas is temporarily stored, and including a nozzle connected to the storage space and configured to guide the process gas or the cleaning gas from the storage space to the inside of the chamber; a susceptor unit arranged to face the head unit and on which a substrate is placeable; a cleaning gas supply unit connected to the head unit and configured to plasmarize the cleaning gas and supply the cleaning gas that is plasmarized to the head unit; and a cleaning gas ejection unit connected to the cleaning gas supply unit and configured to supply the cleaning gas to at least two portions of the storage space.

    DISPLAY DEVICE AND APPARATUS AND METHOD FOR MANUFACTURING THE SAME
    6.
    发明申请
    DISPLAY DEVICE AND APPARATUS AND METHOD FOR MANUFACTURING THE SAME 有权
    显示装置及其制造方法及其制造方法

    公开(公告)号:US20160133873A1

    公开(公告)日:2016-05-12

    申请号:US14811729

    申请日:2015-07-28

    IPC分类号: H01L51/52 H01J37/32 H01L51/56

    摘要: A display device and an apparatus and method for manufacturing the same are disclosed. The display device includes: a substrate; a display unit formed on the substrate; and an inorganic layer formed on the display unit, wherein a water vapor transmission rate (WVTR) of the inorganic layer is 5×10−5 g/m2 day or less. The apparatus for manufacturing a display device includes: a chamber; a shower head for spraying a mixed gas into the chamber; a plasma generation unit for forming plasma from the mixed gas; a susceptor facing the shower head and on which a substrate is seated; and a power supply unit electrically connected to the plasma generation unit, wherein a frequency of a current supplied from the power supply unit to the plasma generation unit is between about 27 MHz and about 42 MHz.

    摘要翻译: 公开了一种显示装置及其制造方法。 显示装置包括:基板; 形成在所述基板上的显示单元; 以及形成在所述显示单元上的无机层,其中所述无机层的水蒸气透过率(WVTR)为5×10 -5 g / m 2·天以下。 用于制造显示装置的装置包括:腔室; 用于将混合气体喷射到所述室中的淋浴头; 用于从所述混合气体形成等离子体的等离子体产生单元; 面向淋浴喷头的感受器,其上安置有基底; 以及电连接到所述等离子体产生单元的电源单元,其中从所述电源单元提供给所述等离子体产生单元的电流的频率在约27MHz至约42MHz之间。

    Display apparatus and method of manufacturing the same

    公开(公告)号:US10361263B2

    公开(公告)日:2019-07-23

    申请号:US15949614

    申请日:2018-04-10

    摘要: Provided is a display apparatus. The display apparatus includes a base substrate, a first transistor disposed on the base substrate and including a first semiconductor layer including a first layer and a second layer disposed to come into contact with a first layer and including a compound made of at least two materials of a Group IV elements, a first control electrode overlapping the first semiconductor layer, a first input electrode connected to the first semiconductor layer, and a first output electrode connected to the first semiconductor layer, a second transistor and an organic light emitting diode.