Invention Grant
- Patent Title: Semiconductor device having a back electrode including Au-Sb alloy layer and method of manufacturing the same
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Application No.: US16722355Application Date: 2019-12-20
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Publication No.: US11217670B2Publication Date: 2022-01-04
- Inventor: Yuji Takahashi , Masaki Watanabe , Masashi Sahara , Kentaro Yamada , Masaki Sakashita , Shinichi Maeda , Yoshiaki Yamada
- Applicant: RENESAS ELECTRONICS CORPORATION
- Applicant Address: JP Tokyo
- Assignee: RENESAS ELECTRONICS CORPORATION
- Current Assignee: RENESAS ELECTRONICS CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: McDermott Will & Emery LLP
- Priority: JPJP2018-239968 20181221
- Main IPC: H01L29/417
- IPC: H01L29/417 ; H01L29/732 ; H01L21/324 ; H01L29/40 ; H01L21/02 ; H01L29/47

Abstract:
A characteristic of a semiconductor device having a back electrode including an Au—Sb alloy is improved. The semiconductor device has a semiconductor substrate and the back electrode including the Au—Sb alloy layer. The back electrode is formed on the semiconductor substrate. The Sb concentration in the Au—Sb alloy layer is equal to or greater than 15 wt %, and equal to or less than 37 wt %. The thickness of the Au—Sb alloy layer is equal to or larger than 20 nm, and equal to or less than 45 nm.
Information query
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