Invention Grant
- Patent Title: Pad structure for front side illuminated image sensor
-
Application No.: US16040567Application Date: 2018-07-20
-
Publication No.: US11222915B2Publication Date: 2022-01-11
- Inventor: Kai-Chun Hsu , Ching-Chun Wang , Dun-Nian Yaung , Jeng-Shyan Lin , Shyh-Fann Ting
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L27/146 ; H01L23/00

Abstract:
The present disclosure, in some embodiments, relates to a method of forming an integrated chip. The method may be performed by forming a plurality of interconnect layers within a dielectric structure over an upper surface of a substrate. A passivation structure is formed over the dielectric structure. The passivation structure has sidewalls and a horizontally extending surface defining has a recess within an upper surface of the passivation structure. A bond pad is formed having a lower surface overlying the horizontally extending surface and one or more protrusions extending outward from the lower surface. The one or more protrusions extend through one or more openings within the horizontally extending surface to contact a first one of the plurality of interconnect layers. An upper passivation layer is deposited on sidewalls and an upper surface of the bond pad and on sidewalls and the upper surface of the passivation structure.
Public/Granted literature
- US20180331146A1 PAD STRUCTURE FOR FRONT SIDE ILLUMINATED IMAGE SENSOR Public/Granted day:2018-11-15
Information query
IPC分类: