Invention Grant
- Patent Title: Ultrasensitive sensor based on a piezoelectric transistor
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Application No.: US16413116Application Date: 2019-05-15
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Publication No.: US11237160B2Publication Date: 2022-02-01
- Inventor: Qing Cao , Jianshi Tang , Ning Li , Ying He
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Stosch Sabo
- Main IPC: G01N33/543
- IPC: G01N33/543 ; G01N27/07 ; H01L41/187 ; H01L41/23 ; H01L41/314 ; H01L41/29 ; H01L41/18
Abstract:
Chemical sensors include a functionalized electrode configured to change surface potential in the presence of an analyte. A piezoelectric element is connected to the functionalized electrode. A piezoresistive element is in contact with the piezoelectric element.
Public/Granted literature
- US20190265181A1 ULTRASENSITIVE SENSOR BASED ON A PIEZOELECTRIC TRANSISTOR Public/Granted day:2019-08-29
Information query
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