Invention Grant
- Patent Title: Semiconductor device having stacked transistor pairs and method of forming same
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Application No.: US16441725Application Date: 2019-06-14
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Publication No.: US11244949B2Publication Date: 2022-02-08
- Inventor: Pieter Weckx , Juergen Boemmels , Julien Ryckaert
- Applicant: IMEC vzw
- Applicant Address: BE Leuven
- Assignee: IMEC vzw
- Current Assignee: IMEC vzw
- Current Assignee Address: BE Leuven
- Agency: Knobbe, Martens, Olson & Bear, LLP
- Priority: EP18178065 20180615
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L27/11 ; G11C5/02 ; G11C5/06 ; G11C11/412 ; H01L21/822 ; H01L21/8238

Abstract:
The disclosed technology generally relates to semiconductor devices and more particularly to a semiconductor device comprising stacked complementary transistor pairs. In one aspect, a semiconductor device comprises first and second sets of transistors comprising a pass transistor and a stacked complementary transistor pair of a lower transistor and an upper transistor, wherein first transistor comprises a semiconductor channel extending along a horizontal first fin track, and each second transistor comprises a semiconductor channel extending along a second fin track parallel to the first fin track, and wherein the semiconductor channels of the pass transistors and of the lower transistors are arranged at a first level and the semiconductor channels of said upper transistors are arranged at a second level, a first tall gate electrode forming a common gate for the first complementary transistor pair and arranged along a horizontal first gate track, and a first short gate electrode forming a gate for the first pass transistor and arranged along a second gate track, a second tall gate electrode forming a common gate for the second complementary transistor pair and arranged along the second gate track, a second short gate electrode forming a gate for the second pass transistor and arranged along the first gate track, first and second contact arrangements forming a common drain contact for the transistors of the first set and the second set, respectively, and first and second cross-couple contacts extending horizontally between and interconnecting the first tall gate electrode and the second contact arrangement, and the second tall gate electrode and the first contact arrangement, respectively.
Public/Granted literature
- US20190386011A1 SEMICONDUCTOR DEVICE AND METHOD OF FORMING SEMICONDUCTOR DEVICE Public/Granted day:2019-12-19
Information query
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