Invention Grant
- Patent Title: Temperature monitoring apparatus, heat treatment apparatus, and temperature monitoring method
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Application No.: US16396994Application Date: 2019-04-29
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Publication No.: US11257697B2Publication Date: 2022-02-22
- Inventor: Tatsuya Yamaguchi , Yasuaki Kikuchi
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Abelman, Frayne & Schwab
- Priority: JPJP2018-088379 20180501
- Main IPC: H01L21/67
- IPC: H01L21/67 ; G01K7/42 ; G01K1/14 ; G01K1/02 ; G01D1/18
Abstract:
A temperature monitoring apparatus includes: a calculator configured to calculate a temperature monitoring waveform by a first-order lag function based on an elapsed time from a start of a temperature change from a first temperature to a second temperature, and a time constant calculated based on a locus of the temperature change; and a monitor configured to monitor a temperature changing from the first temperature to the second temperature based on the temperature monitoring waveform calculated by the calculator.
Public/Granted literature
- US20190341284A1 TEMPERATURE MONITORING APPARATUS, HEAT TREATMENT APPARATUS, AND TEMPERATURE MONITORING METHOD Public/Granted day:2019-11-07
Information query
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