Invention Grant
- Patent Title: Gate-all-around (GAA) transistors with additional bottom channel for reduced parasitic capacitance and methods of fabrication
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Application No.: US16893993Application Date: 2020-06-05
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Publication No.: US11257917B2Publication Date: 2022-02-22
- Inventor: Jun Yuan , Peijie Feng , Stanley Seungchul Song , Kern Rim
- Applicant: QUALCOMM Incorporated
- Applicant Address: US CA San Diego
- Assignee: QUALCOMM Incorporated
- Current Assignee: QUALCOMM Incorporated
- Current Assignee Address: US CA San Diego
- Agency: Qualcomm Incorporated
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L21/8234 ; H01L29/08 ; H01L29/06

Abstract:
Gate-all-around (GAA) transistors with an additional bottom channel for reduced parasitic capacitance and methods of fabricating the same include one or more channels positioned between a source region and a drain region. The one or more channels, which may be nanowire or nanoslab semiconductors, are surrounded by gate material. The GAA transistor further includes an additional semiconductor channel between a bottom section of a gate material and a silicon on insulator (SOI) substrate in a GAA transistor. This additional channel, sometimes referred to as a bottom channel, may be thinner than other channels in the GAA transistor and may have a thickness less than its length.
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Information query
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