Invention Grant
- Patent Title: Active and dummy fin structures
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Application No.: US16751779Application Date: 2020-01-24
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Publication No.: US11264504B2Publication Date: 2022-03-01
- Inventor: Yanping Shen , Haiting Wang , Hong Yu
- Applicant: GLOBALFOUNDRIES U.S. INC.
- Applicant Address: US CA Santa Clara
- Assignee: GLOBALFOUNDRIES U.S. INC.
- Current Assignee: GLOBALFOUNDRIES U.S. INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Roberts Calderon Safran & Cole, P.C.
- Agent Francois Pagette; Andrew M. Calderon
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/16 ; H01L29/423

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to a scheme of active and dummy fin structures and methods of manufacture. The structure includes: an active fin structure; at least one dummy fin structure running along at least one side of the active fin structure along its length; a fin cut separating the at least one dummy fin structure along its longitudinal axes; and a gate structure extending over the active fin structure and the fin cut.
Public/Granted literature
- US20210234034A1 ACTIVE AND DUMMY FIN STRUCTURES Public/Granted day:2021-07-29
Information query
IPC分类: