- 专利标题: Cleaning liquid composition
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申请号: US16473625申请日: 2017-12-26
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公开(公告)号: US11279904B2公开(公告)日: 2022-03-22
- 发明人: Kikue Morita , Areji Takanaka , Takuo Ohwada
- 申请人: Kanto Kagaku Kabushiki Kaisha
- 申请人地址: JP Tokyo
- 专利权人: Kanto Kagaku Kabushiki Kaisha
- 当前专利权人: Kanto Kagaku Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: McDonnell Boehnen Hulbert & Berghoff LLP
- 优先权: JPJP2016-254312 20161227
- 国际申请: PCT/JP2017/046737 WO 20171226
- 国际公布: WO2018/124109 WO 20180705
- 主分类号: C11D11/00
- IPC分类号: C11D11/00 ; C11D3/28 ; C11D3/30 ; C11D3/33 ; C11D3/36 ; C11D17/00 ; C23G1/20 ; H01L21/02 ; H01L21/321 ; H01L23/532
摘要:
Provided is a cleaning liquid composition which is useful for cleaning of a substrate or the like that has been subjected to a chemical mechanical polishing (CMP) process, etc in the production steps of an electronic device such as a semiconductor element. A cleaning liquid composition according to the present invention is used for the purpose of cleaning a substrate that has a Cu wiring, and comprises one or more basic compounds and one or more nitrogen-containing monocyclic heterocyclic aromatic compounds that contain one or more carboxyl groups or ester groups, provided that in cases where one or more amino groups are contained therein, only amino groups directly bonded to a nitrogen-containing heterocyclic rind are contained. This cleaning liquid composition has a hydrogen ion concentration (pH) of 8-12.
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