Invention Grant
- Patent Title: 3D dram structure with high mobility channel
-
Application No.: US16779830Application Date: 2020-02-03
-
Publication No.: US11295786B2Publication Date: 2022-04-05
- Inventor: Chang Seok Kang , Tomohiko Kitajima , Gill Yong Lee , Sanjay Natarajan , Sung-Kwan Kang , Lequn Liu
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Servilla Whitney LLC
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L21/8242 ; G11C5/06

Abstract:
Memory devices are described. The memory devices include a plurality of bit lines extending through a stack of alternating memory layers and dielectric layers. Each of the memory layers comprises a single crystalline-like silicon layer and includes a first word line, a second word line, a first capacitor, and a second capacitor. Methods of forming stacked memory devices are also described.
Public/Granted literature
- US20200251151A1 3D DRAM STRUCTURE WITH HIGH MOBILITY CHANNEL Public/Granted day:2020-08-06
Information query
IPC分类: