Invention Grant
- Patent Title: Apparatus and method for automated wafer carrier handling
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Application No.: US16787028Application Date: 2020-02-11
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Publication No.: US11295973B2Publication Date: 2022-04-05
- Inventor: Ren-Hau Wu , Cheng-Lung Wu , Jiun-Rong Pai , Cheng-Kang Hu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: JCIPRNET
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L21/67

Abstract:
An apparatus and an operating method for automated wafer carrier handling are provided. The apparatus includes a base frame and an engaging mechanism disposed on the base frame. The engaging mechanism includes a controller and an active expansion component moveably coupled to the base frame and controlled by the controller to perform a reciprocating movement relative to the base frame. The active expansion component is driven by the controller to pass through the base frame to be engaged with a top flange mounted on the wafer carrier.
Public/Granted literature
- US20210249282A1 APPARATUS AND METHOD FOR AUTOMATED WAFER CARRIER HANDLING Public/Granted day:2021-08-12
Information query
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