Invention Grant
- Patent Title: Three-dimensional memory device including ferroelectric-metal-insulator memory cells and methods of making the same
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Application No.: US16876816Application Date: 2020-05-18
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Publication No.: US11302716B2Publication Date: 2022-04-12
- Inventor: Raghuveer S. Makala , Yanli Zhang , Fei Zhou , Rahul Sharangpani , Adarsh Rajashekhar , Seung-Yeul Yang
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Agency: The Marbury Law Group PLLC
- Main IPC: H01L27/11597
- IPC: H01L27/11597 ; H01L27/11587 ; H01L27/1159 ; H01L27/11585 ; H01L23/528 ; H01L23/522

Abstract:
A memory opening or a line trench is formed through an alternating stack of insulating layers and sacrificial material layers. A memory opening fill structure or a memory stack assembly is formed, which includes a vertical stack of discrete intermediate metallic electrodes formed on sidewalls of the sacrificial material layers, a gate dielectric layer, and a vertical semiconductor channel. Backside recesses are formed by removing the sacrificial material layers selective to the insulating layers, and a combination of a ferroelectric dielectric layer and an electrically conductive layer within each of the backside recesses. The electrically conductive layer is laterally spaced from a respective one of the discrete intermediate metallic electrodes by the ferroelectric dielectric layer. Ferroelectric-metal-insulator memory elements are formed around the vertical semiconductor channel.
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