Invention Grant
- Patent Title: Fishbone long channel nanosheet device
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Application No.: US16736898Application Date: 2020-01-08
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Publication No.: US11329167B2Publication Date: 2022-05-10
- Inventor: Jingyun Zhang , Xin Miao , Ruilong Xie , Alexander Reznicek
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, PC
- Agent Jeffrey S. LaBaw
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L29/06 ; H01L29/423 ; H01L29/66 ; H01L21/02 ; H01L21/3065

Abstract:
A method is presented for reducing sagging effects in nanosheet devices. The method includes forming at least two nanosheet structures over a substrate, wherein each nanosheet structure includes alternating layers of a first semiconductor material and a second semiconductor material, depositing a dielectric layer over the at least two nanosheet structures, depositing a dummy gate over the dielectric layer, etching the first semiconductor material to create voids filled with inner spacers, removing the dummy gate and the dielectric layer such that a supporting dielectric section remains between the at least two nanosheet structures, and removing the etched first semiconductor material such that a supporting structure is defined including the supporting dielectric section and the second semiconductor material.
Public/Granted literature
- US20210210637A1 FISHBONE LONG CHANNEL NANOSHEET DEVICE Public/Granted day:2021-07-08
Information query
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