Vacuum pump and control apparatus associated with vacuum pump
Abstract:
A vacuum pump includes a regenerative resistor removed from the control apparatus and disposed in the vacuum pump. More specifically, the regenerative resistor is detached from a control board (control apparatus) on which a control circuit is mounted, and disposed in a base of the vacuum pump, and connected to the control board via a wire. Further, a gap is provided between the base of the vacuum pump and the control apparatus. Moreover, a cover (outer covering body) is provided in the regenerative resistor disposed in the base part of the vacuum pump and the wire part. Since the regenerative resistor is provided in the base of the vacuum pump, which has a large heat capacity, a temperature increase of the control apparatus is reduced.
Public/Granted literature
Information query
Patent Agency Ranking
0/0