Invention Grant
- Patent Title: Polishing composition
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Application No.: US16495442Application Date: 2018-03-09
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Publication No.: US11339310B2Publication Date: 2022-05-24
- Inventor: Shogo Onishi , Yukari Uehara , Kenichi Komoto
- Applicant: FUJIMI INCORPORATED
- Applicant Address: JP Aichi
- Assignee: FUJIMI INCORPORATED
- Current Assignee: FUJIMI INCORPORATED
- Current Assignee Address: JP Aichi
- Agency: Katten Muchin Rosenman LLP
- Priority: JPJP2017-056433 20170322
- International Application: PCT/JP2018/009315 WO 20180309
- International Announcement: WO2018/173814 WO 20180927
- Main IPC: C09G1/02
- IPC: C09G1/02 ; H01L21/321

Abstract:
The present invention provides a polishing composition having a high polishing speed and a low etching speed and capable of achieving sufficient flattening.
The present invention is a polishing composition containing abrasive grains, an oxidizing agent, an acid, an anticorrosive containing a compound represented by the following formula (1) or a salt thereof, and a dispersing medium. (In the formula (1), R1 is a linear or branched alkyl group having 6 or more and 30 or less carbon atoms or a linear or branched alkenyl group having 6 or more and 30 or less carbon atoms, R2 is a single bond or an alkylene group having 1 or more and 4 or less carbon atoms, and R3 is a hydrogen atom or a linear or branched alkyl group having 1 or more and 10 or less carbon atoms.)
The present invention is a polishing composition containing abrasive grains, an oxidizing agent, an acid, an anticorrosive containing a compound represented by the following formula (1) or a salt thereof, and a dispersing medium. (In the formula (1), R1 is a linear or branched alkyl group having 6 or more and 30 or less carbon atoms or a linear or branched alkenyl group having 6 or more and 30 or less carbon atoms, R2 is a single bond or an alkylene group having 1 or more and 4 or less carbon atoms, and R3 is a hydrogen atom or a linear or branched alkyl group having 1 or more and 10 or less carbon atoms.)
Public/Granted literature
- US20200062997A1 Polishing Composition Public/Granted day:2020-02-27
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