Invention Grant
- Patent Title: Through-stack contact via structures for a three-dimensional memory device and methods of forming the same
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Application No.: US16881346Application Date: 2020-05-22
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Publication No.: US11355506B2Publication Date: 2022-06-07
- Inventor: Hirofumi Tokita , Takayuki Maekura , Romain Mentek
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Agency: The Marbury Law Group PLLC
- Main IPC: H01L27/11556
- IPC: H01L27/11556 ; H01L23/528 ; H01L25/065 ; H01L23/522 ; H01L21/822 ; H01L27/11519 ; H01L27/11524

Abstract:
A first-tier structure includes a first vertically alternating sequence of first continuous insulating layers and first continuous sacrificial material layers and a first-tier retro-stepped dielectric material portion overlying first stepped surfaces of the first vertically alternating sequence. A second vertically alternating sequence of second continuous insulating layers and second continuous sacrificial material layers is formed over the first-tier structure. A vertically alternating stack of insulating plates and dielectric material is formed over the first-tier retro-stepped dielectric material portion. Alternatively, dielectric pillar structures may be formed in lieu of the vertically alternating stack. After formation of memory stack structures, electrically conductive layers replace portions of the first and second continuous sacrificial material layers. Contact via structures are formed through the vertically alternating stack or the dielectric pillar structures, through the first retro-stepped dielectric material portion, and directly on a first subset of the electrically conductive layers.
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