Invention Grant
- Patent Title: Mode control of photonic crystal fiber based broadband radiation sources
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Application No.: US17004140Application Date: 2020-08-27
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Publication No.: US11360396B2Publication Date: 2022-06-14
- Inventor: Sebastian Thomas Bauerschmidt , Peter Maximilian Götz , Patrick Sebastian Uebel , Ronald Franciscus Herman Hugers , Jan Adrianus Boer , Edwin Johannes Cornelis Bos , Andreas Johannes Antonius Brouns , Vitaliy Prosyentsov , Paul William Scholtes-Van Eijk , Paulus Antonius Andreas Teunissen , Mahesh Upendra Ajgaonkar
- Applicant: ASML NETHERLANDS B.V. , ASML HOLDING N.V.
- Applicant Address: NL Veldhoven; NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.,ASML HOLDING N.V.
- Current Assignee: ASML NETHERLANDS B.V.,ASML HOLDING N.V.
- Current Assignee Address: NL Veldhoven; NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Priority: EP19194974 20190902,EP19215183 20191211,EP20152635 20200120,EP20165824 20200326
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G02B1/00 ; G02B6/02 ; G01B11/27 ; G01J1/42 ; G01M11/00

Abstract:
A mode control system and method for controlling an output mode of a broadband radiation source including a photonic crystal fiber (PCF). The mode control system includes at least one detection unit configured to measure one or more parameters of radiation emitted from the broadband radiation source to generate measurement data, and a processing unit configured to evaluate mode purity of the radiation emitted from the broadband radiation source, from the measurement data. Based on the evaluation, the mode control system is configured to generate a control signal for optimization of one or more pump coupling conditions of the broadband radiation source. The one or more pump coupling conditions relate to the coupling of a pump laser beam with respect to a fiber core of the photonic crystal fiber.
Public/Granted literature
- US20210063894A1 MODE CONTROL OF PHOTONIC CRYSTAL FIBER BASED BROADBAND RADIATION SOURCES Public/Granted day:2021-03-04
Information query
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