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公开(公告)号：US20220269183A1
公开(公告)日：2022-08-25
申请号：US17741545
申请日：2022-05-11
Applicant: ASML NETHERLANDS B.V. , ASML HOLDING N.V.
Inventor： Sebastian Thomas Bauerschmidt , Peter Maximilian Götz , Patrick Sebastian Uebel , Ronald Franciscus Herman Hugers , Jan Adrianus Boer , Edwin Johannes Cornelis Bos , Andreas Johannes Antonius Brouns , Vitaliy Prosyentsov , Paul William Scholtes - Van Eijk , Paulus Antonius Andreas Teunissen , Mahesh Upendra Ajgaonkar
Abstract: A mode control system and method for controlling an output mode of a broadband radiation source including a photonic crystal fiber (PCF). The mode control system includes at least one detection unit configured to measure one or more parameters of radiation emitted from the broadband radiation source to generate measurement data, and a processing unit configured to evaluate mode purity of the radiation emitted from the broadband radiation source, from the measurement data. Based on the evaluation, the mode control system is configured to generate a control signal for optimization of one or more pump coupling conditions of the broadband radiation source. The one or more pump coupling conditions relate to the coupling of a pump laser beam with respect to a fiber core of the photonic crystal fiber.
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公开(公告)号：US11687009B2
公开(公告)日：2023-06-27
申请号：US17741545
申请日：2022-05-11
Applicant: ASML NETHERLANDS B.V. , ASML HOLDING N.V.
Inventor： Sebastian Thomas Bauerschmidt , Peter Maximilian Götz , Patrick Sebastian Uebel , Ronald Franciscus Herman Hugers , Jan Adrianus Boer , Edwin Johannes Cornelis Bos , Andreas Johannes Antonius Brouns , Vitaliy Prosyentsov , Paul William Scholtes-Van Eijk , Paulus Antonius Andreas Teunissen , Mahesh Upendra Ajgaonkar
CPC classification number: G03F7/70625 , G01B11/27 , G01J1/4257 , G01M11/30 , G02B1/005 , G02B6/02 , G03F7/7065 , G03F7/70525
Abstract: A mode control system and method for controlling an output mode of a broadband radiation source including a photonic crystal fiber (PCF). The mode control system includes at least one detection unit configured to measure one or more parameters of radiation emitted from the broadband radiation source to generate measurement data, and a processing unit configured to evaluate mode purity of the radiation emitted from the broadband radiation source, from the measurement data. Based on the evaluation, the mode control system is configured to generate a control signal for optimization of one or more pump coupling conditions of the broadband radiation source. The one or more pump coupling conditions relate to the coupling of a pump laser beam with respect to a fiber core of the photonic crystal fiber.
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公开(公告)号：US11360396B2
公开(公告)日：2022-06-14
申请号：US17004140
申请日：2020-08-27
Applicant: ASML NETHERLANDS B.V. , ASML HOLDING N.V.
Inventor： Sebastian Thomas Bauerschmidt , Peter Maximilian Götz , Patrick Sebastian Uebel , Ronald Franciscus Herman Hugers , Jan Adrianus Boer , Edwin Johannes Cornelis Bos , Andreas Johannes Antonius Brouns , Vitaliy Prosyentsov , Paul William Scholtes-Van Eijk , Paulus Antonius Andreas Teunissen , Mahesh Upendra Ajgaonkar
Abstract: A mode control system and method for controlling an output mode of a broadband radiation source including a photonic crystal fiber (PCF). The mode control system includes at least one detection unit configured to measure one or more parameters of radiation emitted from the broadband radiation source to generate measurement data, and a processing unit configured to evaluate mode purity of the radiation emitted from the broadband radiation source, from the measurement data. Based on the evaluation, the mode control system is configured to generate a control signal for optimization of one or more pump coupling conditions of the broadband radiation source. The one or more pump coupling conditions relate to the coupling of a pump laser beam with respect to a fiber core of the photonic crystal fiber.
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