公开(公告)号：US11687009B2

公开(公告)日：2023-06-27

申请号：US17741545

申请日：2022-05-11

Applicant: ASML NETHERLANDS B.V. ,  ASML HOLDING N.V.

Inventor： Sebastian Thomas Bauerschmidt ,  Peter Maximilian Götz ,  Patrick Sebastian Uebel ,  Ronald Franciscus Herman Hugers ,  Jan Adrianus Boer ,  Edwin Johannes Cornelis Bos ,  Andreas Johannes Antonius Brouns ,  Vitaliy Prosyentsov ,  Paul William Scholtes-Van Eijk ,  Paulus Antonius Andreas Teunissen ,  Mahesh Upendra Ajgaonkar

IPC: G03F7/20 ,  G03F7/00 ,  G02B1/00 ,  G02B6/02 ,  G01B11/27 ,  G01J1/42 ,  G01M11/00

CPC classification number: G03F7/70625 ,  G01B11/27 ,  G01J1/4257 ,  G01M11/30 ,  G02B1/005 ,  G02B6/02 ,  G03F7/7065 ,  G03F7/70525

Abstract: A mode control system and method for controlling an output mode of a broadband radiation source including a photonic crystal fiber (PCF). The mode control system includes at least one detection unit configured to measure one or more parameters of radiation emitted from the broadband radiation source to generate measurement data, and a processing unit configured to evaluate mode purity of the radiation emitted from the broadband radiation source, from the measurement data. Based on the evaluation, the mode control system is configured to generate a control signal for optimization of one or more pump coupling conditions of the broadband radiation source. The one or more pump coupling conditions relate to the coupling of a pump laser beam with respect to a fiber core of the photonic crystal fiber.

公开(公告)号：US11360396B2

公开(公告)日：2022-06-14

申请号：US17004140

申请日：2020-08-27

Applicant: ASML NETHERLANDS B.V. ,  ASML HOLDING N.V.

Inventor： Sebastian Thomas Bauerschmidt ,  Peter Maximilian Götz ,  Patrick Sebastian Uebel ,  Ronald Franciscus Herman Hugers ,  Jan Adrianus Boer ,  Edwin Johannes Cornelis Bos ,  Andreas Johannes Antonius Brouns ,  Vitaliy Prosyentsov ,  Paul William Scholtes-Van Eijk ,  Paulus Antonius Andreas Teunissen ,  Mahesh Upendra Ajgaonkar

IPC: G03F7/20 ,  G02B1/00 ,  G02B6/02 ,  G01B11/27 ,  G01J1/42 ,  G01M11/00

Abstract: A mode control system and method for controlling an output mode of a broadband radiation source including a photonic crystal fiber (PCF). The mode control system includes at least one detection unit configured to measure one or more parameters of radiation emitted from the broadband radiation source to generate measurement data, and a processing unit configured to evaluate mode purity of the radiation emitted from the broadband radiation source, from the measurement data. Based on the evaluation, the mode control system is configured to generate a control signal for optimization of one or more pump coupling conditions of the broadband radiation source. The one or more pump coupling conditions relate to the coupling of a pump laser beam with respect to a fiber core of the photonic crystal fiber.

公开(公告)号：US11733617B2

公开(公告)日：2023-08-22

申请号：US17572864

申请日：2022-01-11

Applicant: ASML Netherlands B.V.

Inventor： Patrick Sebastian Uebel ,  Sebastian Thomas Bauerschmidt ,  Paul William Scholtes-Van Eijk

IPC: G03F7/20 ,  G03B27/42 ,  G03F9/00 ,  G03F7/00 ,  G02B6/02 ,  G02F1/365

CPC classification number: G03F9/7065 ,  G02B6/02328 ,  G02F1/365 ,  G03F7/7015 ,  G03F7/70133 ,  G03F7/70316 ,  G03F7/70325 ,  G03F7/70575 ,  G03F7/70616

Abstract: An apparatus for receiving input radiation and broadening a frequency range of the input radiation to provide broadband output radiation. The apparatus includes a chamber, a fiber, a gas generating apparatus, and a radical generating apparatus. The fiber includes a hollow core configured to guide radiation propagating through the fiber, the hollow core in fluid communication with the chamber. The gas generating apparatus is configured to provide a gas within the chamber. The radical generating apparatus is configured to provide free radicals within the chamber to reduce contaminants in the gas. The apparatus may be included in a radiation source.

公开(公告)号：US10990021B2

公开(公告)日：2021-04-27

申请号：US16789816

申请日：2020-02-13

Applicant: ASML Netherlands B.V.

Inventor： Paul William Scholtes-Van Eijk ,  Ronald Franciscus Herman Hugers

IPC: G03F7/20

Abstract: Disclosed is a metrology apparatus for use in a lithographic manufacturing process. The metrology apparatus comprises a radiation source comprising a drive laser having an output split into a plurality of optical paths, each comprising a respective broadband light generator. The metrology apparatus further comprises illumination optics for illuminating a structure, at least one detection system for detecting scattered radiation, having been scattered by the structure and a processor for determining a parameter of interest of the structure from the scattered radiation.

公开(公告)号：US20220128912A1

公开(公告)日：2022-04-28

申请号：US17572864

申请日：2022-01-11

Applicant: ASML Netherlands B.V.

Inventor： Patrick Sebastian Uebel ,  Sebastian Thomas Bauerschmidt ,  Paul William Scholtes-Van Eijk

IPC: G03F9/00 ,  G03F7/20 ,  G02B6/02 ,  G02F1/365

Abstract: An apparatus for receiving input radiation and broadening a frequency range of the input radiation to provide broadband output radiation. The apparatus includes a chamber, a fiber, a gas generating apparatus, and a radical generating apparatus. The fiber includes a hollow core configured to guide radiation propagating through the fiber, the hollow core in fluid communication with the chamber. The gas generating apparatus is configured to provide a gas within the chamber. The radical generating apparatus is configured to provide free radicals within the chamber to reduce contaminants in the gas. The apparatus may be included in a radiation source.

公开(公告)号：US11275313B2

公开(公告)日：2022-03-15

申请号：US17213983

申请日：2021-03-26

Applicant: ASML Netherlands B.V.

Inventor： Paul William Scholtes-Van Eijk ,  Ronald Franciscus Herman Hugers

IPC: G03F7/20

Abstract: Disclosed is a metrology apparatus for use in a lithographic manufacturing process. The metrology apparatus comprises a radiation source comprising a drive laser having an output split into a plurality of optical paths, each comprising a respective broadband light generator. The metrology apparatus further comprises illumination optics for illuminating a structure, at least one detection system for detecting scattered radiation, having been scattered by the structure and a processor for determining a parameter of interest of the structure from the scattered radiation.

公开(公告)号：US11262665B2

公开(公告)日：2022-03-01

申请号：US16827843

申请日：2020-03-24

Applicant: ASML Netherlands B.V.

Inventor： Patrick Sebastian Uebel ,  Sebastian Thomas Bauerschmidt ,  Paul William Scholtes-Van Eijk

IPC: G03F9/00 ,  G03F7/20 ,  G02B6/02 ,  G02F1/365

Abstract: An apparatus (100) for receiving input radiation (108) and broadening a frequency range of the input radiation so as to provide broadband output radiation (110). The apparatus comprises a fiber (102), wherein the fiber (102) may comprise a hollow core (104) for guiding radiation propagating through the fiber (102). The apparatus (100) further comprises an apparatus for providing a gas mixture (106) within the hollow core (104). The gas mixture (106) comprises a hydrogen component, and a working component, wherein the working component is for broadening a frequency range of a received input radiation (108) so as to provide the broadband output radiation (110). The apparatus may be included in a radiation source.