Invention Grant
- Patent Title: Asymmetric source drain structures
-
Application No.: US16676488Application Date: 2019-11-07
-
Publication No.: US11362178B2Publication Date: 2022-06-14
- Inventor: Jiehui Shu , Rinus Tek Po Lee , Baofu Zhu
- Applicant: GLOBALFOUNDRIES U.S. INC.
- Applicant Address: US CA Santa Clara
- Assignee: GLOBALFOUNDRIES U.S. INC.
- Current Assignee: GLOBALFOUNDRIES U.S. INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Roberts Calderon Safran & Cole, P.C.
- Agent Francois Pagette; Andrew M. Calderon
- Main IPC: H01L29/08
- IPC: H01L29/08 ; H01L29/78 ; H01L29/66 ; H01L21/8234 ; H01L29/423 ; H01L27/088

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to asymmetric source and drain structures and methods of manufacture. The structure includes: at least one gate structure; a straight spacer adjacent to the at least one gate structure; and an L-shaped spacer on a side of the at least one gate structure opposing the straight spacer, the L-shaped spacer extending a first diffusion region further away from the at least one gate structure than the straight spacer extends a second diffusion region on a second side away from the at least one gate structure.
Public/Granted literature
- US20210143254A1 ASYMMETRIC SOURCE DRAIN STRUCTURES Public/Granted day:2021-05-13
Information query
IPC分类: