Invention Grant
- Patent Title: Vacuum pump apparatus, and pump main body unit, control unit, and spacer each for use in vacuum pump apparatus
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Application No.: US16477745Application Date: 2018-01-12
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Publication No.: US11408429B2Publication Date: 2022-08-09
- Inventor: Yoshiyuki Sakaguchi , Yanbin Sun , Kengo Saegusa , Hideki Omori
- Applicant: Edwards Japan Limited
- Applicant Address: JP Chiba
- Assignee: Edwards Japan Limited
- Current Assignee: Edwards Japan Limited
- Current Assignee Address: JP Chiba
- Agency: Westman, Champlin & Koehler, P.A.
- Agent Theodore M. Magee
- Priority: JPJP2017-008275 20170120
- International Application: PCT/JP2018/000698 WO 20180112
- International Announcement: WO2018/135412 WO 20180726
- Main IPC: F04D25/06
- IPC: F04D25/06 ; F04D19/04 ; H05K5/02 ; F04B37/14 ; F04B39/00 ; F04B37/16 ; F04D29/64 ; F04D29/52
Abstract:
Provided is a vacuum pump apparatus which allows reductions in thickness, weight, size, and cost of a vacuum pump control device. In the vacuum pump apparatus, a pump main body unit and a control unit which controls driving of the pump main body unit are integrated with each other. The vacuum pump apparatus has a configuration in which a spacer configured to support a load applied to a housing of the control unit is provided between a base of the pump main body unit and the housing of the control unit.
Information query
