Invention Grant
- Patent Title: Stage and electrode member
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Application No.: US16976544Application Date: 2019-07-08
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Publication No.: US11421323B2Publication Date: 2022-08-23
- Inventor: Daisuke Hayashi , Shinya Ishikawa
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Ipusa, PLLC
- Priority: JPJP2018-136095 20180719
- International Application: PCT/JP2019/027041 WO 20190708
- International Announcement: WO2020/017387 WO 20200123
- Main IPC: C23C16/458
- IPC: C23C16/458 ; C23C14/50 ; C23C16/46 ; H01J37/32 ; C23C16/455 ; H01L21/3065 ; C23C16/509

Abstract:
A stage for mounting a workpiece and an edge ring is provided, the stage including a first flow path and a second flow path along each of which a fluid flows, within the stage; a bifurcation at which an inlet port of the first flow path and an inlet port of the second flow path are coupled; a junction at which an outlet port of the first flow path and an outlet port of the second flow path are coupled; and a member provided at least one of the bifurcation and the junction, the member having at least one opening that communicates with the first flow path and the second flow path.
Information query
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