- 专利标题: Robust MEMS microphone
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申请号: US17143934申请日: 2021-01-07
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公开(公告)号: US11438706B2公开(公告)日: 2022-09-06
- 发明人: Craig Core , Hamid Basaeri , Robert Littrell
- 申请人: Vesper Technologies, Inc.
- 申请人地址: US MA Boston
- 专利权人: Vesper Technologies, Inc.
- 当前专利权人: Vesper Technologies, Inc.
- 当前专利权人地址: US MA Boston
- 代理机构: Nutter McClennen & Fish LLP
- 主分类号: H04R19/00
- IPC分类号: H04R19/00 ; H04R19/04 ; B81B3/00 ; B81C1/00 ; H04R31/00 ; H04R1/04 ; H04R7/06
摘要:
A robust MEMS transducer includes a kinetic energy diverter disposed within its frontside cavity. The kinetic energy diverter blunts or diverts kinetic energy in a mass of air moving through the frontside cavity, before that kinetic energy reaches a diaphragm of the MEMS transducer. The kinetic energy diverter renders the MEMS transducer more robust and resistant to damage from such a moving mass of air.
公开/授权文献
- US20210211809A1 ROBUST MEMS MICROPHONE 公开/授权日:2021-07-08
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