Acoustic transducer with gap-controlling geometry and method of manufacturing an acoustic transducer

    公开(公告)号:US11259124B2

    公开(公告)日:2022-02-22

    申请号:US16353934

    申请日:2019-03-14

    摘要: A transducer of the preferred embodiment including a transducer and a plurality of adjacent, tapered cantilevered beams. Each of the beams define a beam base, a beam tip, and a beam body disposed between the beam base and the beam tip. The beams are arranged such that each of the beam tips extends toward a common area. Each beam is joined to the substrate along the beam base and is free from the substrate along the beam body. A preferred method of manufacturing a transducer can include: depositing alternating layers of piezoelectric and electrode onto the substrate in block, processing the deposited layers to define cantilever geometry in block, depositing metal traces in block, and releasing the cantilevered beams from the substrate in block.

    Transducer System with Configurable Acoustic Overload Point

    公开(公告)号:US20210160623A1

    公开(公告)日:2021-05-27

    申请号:US17165998

    申请日:2021-02-03

    摘要: A MEMS transducer system has a transducer configured to convert a received signal into an output signal for forwarding by a transducer output port, and an integrated circuit having an IC input in communication with the transducer output port. The IC input is configured to receive an IC input signal produced as a function of the output signal. The system also has a dividing element coupled between the IC input and the transducer output port. The dividing element is configured to selectively attenuate one or more signals into the IC input to at least in part produce the IC input signal. Other implementations may couple a feedback loop to the ground of the transducer (similar to bootstrapping), or pick off voltages at specific portions of the transducer.

    Microphone Having a Digital Output Determined at Different Power Consumption Levels

    公开(公告)号:US20200296530A1

    公开(公告)日:2020-09-17

    申请号:US16819673

    申请日:2020-03-16

    摘要: An acoustic device is described and includes an acoustic sensor element configured to sense acoustic energy and produce an output signal and a threshold detector circuit including a switch having an input coupled to the output of the acoustic sensor element to receive the output signal, a control port that receives a control signal, and first and second output ports, a first channel including an analog-to-digital converter that operates at a first power level a second analog-to-digital converter that operates at a second higher power level, relative to the first power level and a threshold level detector that receives an output from the first analog-to-digital converter to produce the control signal having a first state that causes the switch feed the output signal from the acoustic sensor element to the second analog-to-digital converter when the first digitized output signal meets a threshold criteria.

    PIEZOELECTRIC MEMS MICROPHONE
    8.
    发明申请

    公开(公告)号:US20200148532A1

    公开(公告)日:2020-05-14

    申请号:US16196922

    申请日:2018-11-20

    IPC分类号: B81B7/02 H04R17/02 B81B7/00

    摘要: A microphone including a casing having a front wall, a back wall, and a side wall joining the front wall to the back wall, a transducer mounted to the front wall, the transducer including a substrate and a transducing element, the transducing element having a transducer acoustic compliance dependent on the transducing element dimensions, a back cavity cooperatively defined between the back wall, the side wall, and the transducer, the back cavity having a back cavity acoustic compliance. The transducing element is dimensioned such that the transducing element length matches a predetermined resonant frequency and the transducing element width, thickness, and elasticity produces a transducer acoustic compliance within a given range of the back cavity acoustic compliance.

    Piezoelectric MEMS microphone
    9.
    发明授权

    公开(公告)号:US10170685B2

    公开(公告)日:2019-01-01

    申请号:US14208827

    申请日:2014-03-13

    摘要: A microphone including a casing having a front wall, a back wall, and a side wall joining the front wall to the back wall, a transducer mounted to the front wall, the transducer including a substrate and a transducing element, the transducing element having a transducer acoustic compliance dependent on the transducing element dimensions, a back cavity cooperatively defined between the back wall, the side wall, and the transducer, the back cavity having a back cavity acoustic compliance. The transducing element is dimensioned such that the transducing element length matches a predetermined resonant frequency and the transducing element width, thickness, and elasticity produces a transducer acoustic compliance within a given range of the back cavity acoustic compliance.

    Acoustic Transducer with Gap-Controlling Geometry and Method of Manufacturing an Acoustic Transducer
    10.
    发明申请
    Acoustic Transducer with Gap-Controlling Geometry and Method of Manufacturing an Acoustic Transducer 审中-公开
    具有间隙控制几何的声学传感器和制造声学传感器的方法

    公开(公告)号:US20150271606A1

    公开(公告)日:2015-09-24

    申请号:US14702319

    申请日:2015-05-01

    摘要: A transducer of the preferred embodiment including a transducer and a plurality of adjacent, tapered cantilevered beams. Each of the beams define a beam base, a beam tip, and a beam body disposed between the beam base and the beam tip. The beams are arranged such that each of the beam tips extends toward a common area. Each beam is joined to the substrate along the beam base and is free from the substrate along the beam body. A preferred method of manufacturing a transducer can include: depositing alternating layers of piezoelectric and electrode onto the substrate in block, processing the deposited layers to define cantilever geometry in block, depositing metal traces in block, and releasing the cantilevered beams from the substrate in block.

    摘要翻译: 优选实施例的换能器包括换能器和多个相邻的锥形悬臂梁。 每个梁限定了梁基部,梁尖端和设置在梁基部和梁尖之间的梁主体。 梁被布置成使得每个梁尖端朝向公共区域延伸。 每个光束沿着光束基座连接到基板,并且沿着光束主体离开基板。 制造换能器的优选方法可以包括:将块状的压电和电极的交替层淀积到衬底上,处理沉积的层以限定块中的悬臂几何形状,在块中沉积金属迹线,以及从块中的衬底释放悬臂梁 。