公开(公告)号：US20180159021A1

公开(公告)日：2018-06-07

申请号：US15568553

申请日：2016-04-22

申请人： Vesper Technologies Inc.

发明人： Robert Littrell

IPC分类号： H01L41/083 ,  H01L41/113 ,  H01L41/27 ,  H01L41/316 ,  B81B3/00 ,  B81C1/00 ,  C23C14/34 ,  C23C14/06 ,  C23C14/54 ,  C23C14/14 ,  H04R17/02 ,  H04R31/00 ,  H04R7/06

CPC分类号： H01L41/0838 ,  B81B3/0072 ,  B81B2201/0257 ,  B81B2203/0118 ,  B81C1/00666 ,  B81C2201/017 ,  C23C14/0641 ,  C23C14/14 ,  C23C14/34 ,  C23C14/542 ,  H01L41/04 ,  H01L41/083 ,  H01L41/1136 ,  H01L41/27 ,  H01L41/316 ,  H04R7/06 ,  H04R17/02 ,  H04R31/003

摘要： A transducer includes a first piezoelectric layer; and a second piezoelectric layer that is above the first piezoelectric layer; wherein the second piezoelectric layer is a more compressive layer with an average stress that is less than or more compressive than an average stress of the first piezoelectric layer.

公开(公告)号：US11438706B2

公开(公告)日：2022-09-06

申请号：US17143934

申请日：2021-01-07

申请人： Vesper Technologies, Inc.

发明人： Craig Core ,  Hamid Basaeri ,  Robert Littrell

IPC分类号： H04R19/00 ,  H04R19/04 ,  B81B3/00 ,  B81C1/00 ,  H04R31/00 ,  H04R1/04 ,  H04R7/06

摘要： A robust MEMS transducer includes a kinetic energy diverter disposed within its frontside cavity. The kinetic energy diverter blunts or diverts kinetic energy in a mass of air moving through the frontside cavity, before that kinetic energy reaches a diaphragm of the MEMS transducer. The kinetic energy diverter renders the MEMS transducer more robust and resistant to damage from such a moving mass of air.

公开(公告)号：US20210160623A1

公开(公告)日：2021-05-27

申请号：US17165998

申请日：2021-02-03

申请人： Vesper Technologies, Inc.

发明人： Robert Littrell ,  Ronald Gagnon

IPC分类号： H04R19/04 ,  H04R3/00 ,  H04R17/02 ,  H04R1/04 ,  H04R19/00

摘要： A MEMS transducer system has a transducer configured to convert a received signal into an output signal for forwarding by a transducer output port, and an integrated circuit having an IC input in communication with the transducer output port. The IC input is configured to receive an IC input signal produced as a function of the output signal. The system also has a dividing element coupled between the IC input and the transducer output port. The dividing element is configured to selectively attenuate one or more signals into the IC input to at least in part produce the IC input signal. Other implementations may couple a feedback loop to the ground of the transducer (similar to bootstrapping), or pick off voltages at specific portions of the transducer.

公开(公告)号：US10917727B2

公开(公告)日：2021-02-09

申请号：US16353589

申请日：2019-03-14

申请人： Vesper Technologies, Inc.

发明人： Robert Littrell ,  Ronald Gagnon

IPC分类号： H04R3/00 ,  H04R19/04 ,  H04R17/02 ,  H04R1/04 ,  H04R19/00

摘要： A MEMS transducer system has a transducer configured to convert a received signal into an output signal for forwarding by a transducer output port, and an integrated circuit having an IC input in communication with the transducer output port. The IC input is configured to receive an IC input signal produced as a function of the output signal. The system also has a dividing element coupled between the IC input and the transducer output port. The dividing element is configured to selectively attenuate one or more signals into the IC input to at least in part produce the IC input signal. Other implementations may couple a feedback loop to the ground of the transducer (similar to bootstrapping), or pick off voltages at specific portions of the transducer.

公开(公告)号：US20220369043A1

公开(公告)日：2022-11-17

申请号：US17879454

申请日：2022-08-02

申请人： Vesper Technologies Inc.

发明人： Craig Core ,  Hamid Basaeri ,  Robert Littrell

IPC分类号： H04R19/04 ,  B81B3/00 ,  B81C1/00 ,  H04R19/00 ,  H04R31/00 ,  H04R1/04 ,  H04R7/06

摘要： A robust MEMS transducer includes a kinetic energy diverter disposed within its frontside cavity. The kinetic energy diverter blunts or diverts kinetic energy in a mass of air moving through the frontside cavity, before that kinetic energy reaches a diaphragm of the MEMS transducer. The kinetic energy diverter renders the MEMS transducer more robust and resistant to damage from such a moving mass of air.

公开(公告)号：US11363387B2

公开(公告)日：2022-06-14

申请号：US17165998

申请日：2021-02-03

申请人： Vesper Technologies, Inc.

发明人： Robert Littrell ,  Ronald Gagnon

IPC分类号： H04R3/00 ,  H04R19/04 ,  H04R17/02 ,  H04R1/04 ,  H04R19/00

摘要： A MEMS transducer system has a transducer configured to convert a received signal into an output signal for forwarding by a transducer output port, and an integrated circuit having an IC input in communication with the transducer output port. The IC input is configured to receive an IC input signal produced as a function of the output signal. The system also has a dividing element coupled between the IC input and the transducer output port. The dividing element is configured to selectively attenuate one or more signals into the IC input to at least in part produce the IC input signal. Other implementations may couple a feedback loop to the ground of the transducer (similar to bootstrapping), or pick off voltages at specific portions of the transducer.

公开(公告)号：US11099078B1

公开(公告)日：2021-08-24

申请号：US16110528

申请日：2018-08-23

申请人： Vesper Technologies, Inc.

发明人： Robert Littrell ,  Yu Hui ,  Craig Core ,  Ronald Gagnon

IPC分类号： G01K1/14 ,  G01K1/08 ,  G01K13/00 ,  G01K7/00 ,  G01K11/22 ,  G01K7/18 ,  G01H3/00

摘要： An acoustic sensor has a MEMS die with MEMS structure. Among other things, the MEMS structure includes a diaphragm configured to mechanically respond to incident acoustic signals, and a temperature sensor member configured to detect temperature.

公开(公告)号：US20220279286A1

公开(公告)日：2022-09-01

申请号：US17747454

申请日：2022-05-18

申请人： Vesper Technologies, Inc.

发明人： Robert Littrell ,  Ronald Gagnon

IPC分类号： H04R19/04 ,  H04R3/00 ,  H04R17/02 ,  H04R1/04 ,  H04R19/00

摘要： A MEMS transducer system has a transducer configured to convert a received signal into an output signal for forwarding by a transducer output port, and an integrated circuit having an IC input in communication with the transducer output port. The IC input is configured to receive an IC input signal produced as a function of the output signal. The system also has a dividing element coupled between the IC input and the transducer output port. The dividing element is configured to selectively attenuate one or more signals into the IC input to at least in part produce the IC input signal. Other implementations may couple a feedback loop to the ground of the transducer (similar to bootstrapping), or pick off voltages at specific portions of the transducer.

公开(公告)号：US11217741B2

公开(公告)日：2022-01-04

申请号：US15568553

申请日：2016-04-22

申请人： Vesper Technologies Inc.

发明人： Robert Littrell

IPC分类号： H01L41/083 ,  H01L41/27 ,  H01L41/04 ,  B81B3/00 ,  B81C1/00 ,  C23C14/06 ,  C23C14/14 ,  C23C14/34 ,  C23C14/54 ,  H01L41/113 ,  H01L41/316 ,  H04R7/06 ,  H04R17/02 ,  H04R31/00

摘要： A transducer includes a first piezoelectric layer; and a second piezoelectric layer that is above the first piezoelectric layer; wherein the second piezoelectric layer is a more compressive layer with an average stress that is less than or more compressive than an average stress of the first piezoelectric layer.

公开(公告)号：US20210211809A1

公开(公告)日：2021-07-08

申请号：US17143934

申请日：2021-01-07

申请人： Vesper Technologies, Inc.

发明人： Craig Core ,  Hamid Basaeri ,  Robert Littrell

IPC分类号： H04R19/04 ,  B81B3/00 ,  B81C1/00 ,  H04R19/00 ,  H04R31/00 ,  H04R1/04 ,  H04R7/06

摘要： A robust MEMS transducer includes a kinetic energy diverter disposed within its frontside cavity. The kinetic energy diverter blunts or diverts kinetic energy in a mass of air moving through the frontside cavity, before that kinetic energy reaches a diaphragm of the MEMS transducer. The kinetic energy diverter renders the MEMS transducer more robust and resistant to damage from such a moving mass of air.