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公开(公告)号:US11438706B2
公开(公告)日:2022-09-06
申请号:US17143934
申请日:2021-01-07
发明人: Craig Core , Hamid Basaeri , Robert Littrell
摘要: A robust MEMS transducer includes a kinetic energy diverter disposed within its frontside cavity. The kinetic energy diverter blunts or diverts kinetic energy in a mass of air moving through the frontside cavity, before that kinetic energy reaches a diaphragm of the MEMS transducer. The kinetic energy diverter renders the MEMS transducer more robust and resistant to damage from such a moving mass of air.
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公开(公告)号:US20220369043A1
公开(公告)日:2022-11-17
申请号:US17879454
申请日:2022-08-02
发明人: Craig Core , Hamid Basaeri , Robert Littrell
摘要: A robust MEMS transducer includes a kinetic energy diverter disposed within its frontside cavity. The kinetic energy diverter blunts or diverts kinetic energy in a mass of air moving through the frontside cavity, before that kinetic energy reaches a diaphragm of the MEMS transducer. The kinetic energy diverter renders the MEMS transducer more robust and resistant to damage from such a moving mass of air.
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公开(公告)号:US20210211809A1
公开(公告)日:2021-07-08
申请号:US17143934
申请日:2021-01-07
发明人: Craig Core , Hamid Basaeri , Robert Littrell
摘要: A robust MEMS transducer includes a kinetic energy diverter disposed within its frontside cavity. The kinetic energy diverter blunts or diverts kinetic energy in a mass of air moving through the frontside cavity, before that kinetic energy reaches a diaphragm of the MEMS transducer. The kinetic energy diverter renders the MEMS transducer more robust and resistant to damage from such a moving mass of air.
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