Invention Grant
- Patent Title: In-situ, real-time detection of particulate defects in a fluid
-
Application No.: US16716218Application Date: 2019-12-16
-
Publication No.: US11442000B2Publication Date: 2022-09-13
- Inventor: Mehdi Vaez-Iravani , Sankesha Bhoyar , Rachit Sharma , Guoheng Zhao
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: G01N15/14
- IPC: G01N15/14

Abstract:
Examples disclosed herein generally relate to an apparatus and method for detecting particles in a fluid. A system for imaging a particle includes an imaging device. The imaging device has a lens and a detector. A laser source is configured to emit a laser beam. The detector is configured to accumulate an intensity of an accumulated light that passes through the lens. The accumulated light is scattered by the particle. The particle passes through the laser beam over a given period.
Public/Granted literature
- US20210181084A1 IN-SITU, REAL-TIME DETECTION OF PARTICULATE DEFECTS IN A FLUID Public/Granted day:2021-06-17
Information query