公开(公告)号：US11442000B2

公开(公告)日：2022-09-13

申请号：US16716218

申请日：2019-12-16

Applicant: Applied Materials, Inc.

Inventor： Mehdi Vaez-Iravani ,  Sankesha Bhoyar ,  Rachit Sharma ,  Guoheng Zhao

IPC: G01N15/14

Abstract: Examples disclosed herein generally relate to an apparatus and method for detecting particles in a fluid. A system for imaging a particle includes an imaging device. The imaging device has a lens and a detector. A laser source is configured to emit a laser beam. The detector is configured to accumulate an intensity of an accumulated light that passes through the lens. The accumulated light is scattered by the particle. The particle passes through the laser beam over a given period.