Invention Grant
- Patent Title: Frequency modulation MEMS triaxial gyroscope
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Application No.: US16697092Application Date: 2019-11-26
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Publication No.: US11448507B2Publication Date: 2022-09-20
- Inventor: Alessandro Tocchio , Luca Giuseppe Falorni , Claudia Comi , Valentina Zega
- Applicant: STMICROELECTRONICS S.R.L.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group LLP
- Priority: IT102016000106928 20161024
- Main IPC: G01C19/574
- IPC: G01C19/574 ; G01C19/5747 ; G01C19/5769

Abstract:
A frequency modulation MEMS triaxial gyroscope, having two mobile masses; a first and a second driving body coupled to the mobile masses through elastic elements rigid in a first direction and compliant in a second direction transverse to the first direction; and a third and a fourth driving body coupled to the mobile masses through elastic elements rigid in the second direction and compliant in the first direction. A first and a second driving element are coupled to the first and second driving bodies for causing the mobile masses to translate in the first direction in phase opposition. A third and a fourth driving element are coupled to the third and fourth driving bodies for causing the mobile masses to translate in the second direction and in phase opposition. An out-of-plane driving element is coupled to the first and second mobile masses for causing a translation in a third direction, in phase opposition. Movement-sensing electrodes generate frequency signals as a function of external angular velocities.
Public/Granted literature
- US20200096339A1 FREQUENCY MODULATION MEMS TRIAXIAL GYROSCOPE Public/Granted day:2020-03-26
Information query
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