公开(公告)号：US11933810B2

公开(公告)日：2024-03-19

申请号：US17930689

申请日：2022-09-08

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Valentina Zega ,  Gabriele Gattere ,  Attilio Alberto Frangi ,  Andrea Opreni ,  Manuel Riani

IPC: G01P15/097 ,  G01P15/08 ,  G01P15/125 ,  G01P15/18

CPC classification number: G01P15/097 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/18

Abstract: The present disclosure is directed to a detection structure for a vertical-axis resonant accelerometer. The detection structure includes an inertial mass suspended above a substrate and having a window provided therewithin and traversing it throughout a thickness thereof. The inertial mass is coupled to a main anchorage, arranged in the window and integral with the substrate, through a first and a second anchoring elastic element of a torsional type. The detection structure also includes at least a first resonant element having longitudinal extension, coupled between the first elastic element and a first constraint element arranged in the window. The first constraint element is suspended above the substrate, to which it is fixedly coupled through a first auxiliary anchoring element which extends below the first resonant element with longitudinal extension and is integrally coupled between the first constraint element and the main anchorage.

公开(公告)号：US10520315B2

公开(公告)日：2019-12-31

申请号：US15639608

申请日：2017-06-30

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Alessandro Tocchio ,  Luca Giuseppe Falorni ,  Claudia Comi ,  Valentina Zega

IPC: G01C19/574 ,  G01C19/5747 ,  G01C19/5769

Abstract: A frequency modulation MEMS triaxial gyroscope, having two mobile masses; a first and a second driving body coupled to the mobile masses through elastic elements rigid in a first direction and compliant in a second direction transverse to the first direction; and a third and a fourth driving body coupled to the mobile masses through elastic elements rigid in the second direction and compliant in the first direction. A first and a second driving element are coupled to the first and second driving bodies for causing the mobile masses to translate in the first direction in phase opposition. A third and a fourth driving element are coupled to the third and fourth driving bodies for causing the mobile masses to translate in the second direction and in phase opposition. An out-of-plane driving element is coupled to the first and second mobile masses for causing a translation in a third direction, in phase opposition. Movement-sensing electrodes generate frequency signals as a function of external angular velocities.

公开(公告)号：US12038283B2

公开(公告)日：2024-07-16

申请号：US17821724

申请日：2022-08-23

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Alessandro Tocchio ,  Luca Giuseppe Falorni ,  Claudia Comi ,  Valentina Zega

IPC: G01C19/574 ,  G01C19/5747 ,  G01C19/5769

CPC classification number: G01C19/5747 ,  G01C19/574 ,  G01C19/5769

Abstract: A frequency modulation MEMS triaxial gyroscope, having two mobile masses; a first and a second driving body coupled to the mobile masses through elastic elements rigid in a first direction and compliant in a second direction transverse to the first direction; and a third and a fourth driving body coupled to the mobile masses through elastic elements rigid in the second direction and compliant in the first direction. A first and a second driving element are coupled to the first and second driving bodies for causing the mobile masses to translate in the first direction in phase opposition. A third and a fourth driving element are coupled to the third and fourth driving bodies for causing the mobile masses to translate in the second direction and in phase opposition. An out-of-plane driving element is coupled to the first and second mobile masses for causing a translation in a third direction, in phase opposition. Movement-sensing electrodes generate frequency signals as a function of external angular velocities.

公开(公告)号：US11448507B2

公开(公告)日：2022-09-20

申请号：US16697092

申请日：2019-11-26

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Alessandro Tocchio ,  Luca Giuseppe Falorni ,  Claudia Comi ,  Valentina Zega

IPC: G01C19/574 ,  G01C19/5747 ,  G01C19/5769

Abstract: A frequency modulation MEMS triaxial gyroscope, having two mobile masses; a first and a second driving body coupled to the mobile masses through elastic elements rigid in a first direction and compliant in a second direction transverse to the first direction; and a third and a fourth driving body coupled to the mobile masses through elastic elements rigid in the second direction and compliant in the first direction. A first and a second driving element are coupled to the first and second driving bodies for causing the mobile masses to translate in the first direction in phase opposition. A third and a fourth driving element are coupled to the third and fourth driving bodies for causing the mobile masses to translate in the second direction and in phase opposition. An out-of-plane driving element is coupled to the first and second mobile masses for causing a translation in a third direction, in phase opposition. Movement-sensing electrodes generate frequency signals as a function of external angular velocities.