- 专利标题: Methods of forming apparatuses including air gaps between conductive lines and related apparatuses, memory devices, and electronic systems
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申请号: US16990463申请日: 2020-08-11
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公开(公告)号: US11456208B2公开(公告)日: 2022-09-27
- 发明人: Sidhartha Gupta , David Ross Economy , Richard J. Hill , Kyle A. Ritter , Naveen Kaushik
- 申请人: Micron Technology, Inc.
- 申请人地址: US ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: US ID Boise
- 代理机构: TraskBritt
- 主分类号: H01L21/768
- IPC分类号: H01L21/768 ; H01L23/522 ; H01L23/528 ; H01L23/532 ; H01L27/11582 ; H01L27/11556
摘要:
A method of forming an apparatus includes forming pillar structures extending vertically through a first isolation material, forming conductive lines operatively coupled to the pillar structures, forming dielectric structures overlying the conductive lines, and forming air gaps between neighboring conductive lines. The air gaps are laterally adjacent to the conductive lines with a portion of the air gaps extending above a plane of an upper surface of the laterally adjacent conductive lines and a portion of the air gaps extending below a plane of a lower surface of the laterally adjacent conductive lines. Apparatuses, memory devices, methods of forming a memory device, and electronic systems are also disclosed.
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