Invention Grant
- Patent Title: Magnetoresistive random access memory and method for fabricating the same
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Application No.: US16857152Application Date: 2020-04-23
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Publication No.: US11456331B2Publication Date: 2022-09-27
- Inventor: Jia-Rong Wu , I-Fan Chang , Rai-Min Huang , Ya-Huei Tsai , Yu-Ping Wang
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu
- Agent Winston Hsu
- Priority: CN202010235266.X 20200330
- Main IPC: H01L43/02
- IPC: H01L43/02 ; H01L27/22 ; G11C11/16 ; H01F10/32 ; H01F41/34 ; H01L23/522 ; H01L23/528 ; H01L43/12 ; H01L43/10

Abstract:
A method for fabricating semiconductor device includes the steps of: providing a substrate having a logic region and a magnetoresistive random access memory (MRAM) region, forming a magnetic tunneling junction (MTJ) on the MRAM region, forming a metal interconnection on the MTJ, forming a dielectric layer on the metal interconnection, patterning the dielectric layer to form openings, and forming the blocking layer on the patterned dielectric layer and the metal interconnection and into the openings.
Public/Granted literature
- US20210305316A1 SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2021-09-30
Information query
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