- 专利标题: Ion beam irradiation apparatus and program therefor
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申请号: US16801689申请日: 2020-02-26
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公开(公告)号: US11462385B2公开(公告)日: 2022-10-04
- 发明人: Shinya Takemura
- 申请人: NISSIN ION EQUIPMENT CO., LTD.
- 申请人地址: JP Koga
- 专利权人: NISSIN ION EQUIPMENT CO., LTD.
- 当前专利权人: NISSIN ION EQUIPMENT CO., LTD.
- 当前专利权人地址: JP Koga
- 代理机构: Sughrue Mion, PLLC
- 优先权: JPJP2019-057092 20190325,JPJP2019-194959 20191028
- 主分类号: H01J37/302
- IPC分类号: H01J37/302 ; H01J37/08 ; G06N20/00 ; G06N5/04
摘要:
An ion beam irradiation apparatus includes modules for generating an ion beam meeting a processing condition, and a machine learning part that generates a learning algorithm using, as an explanatory variable, a processing condition during new processing and a monitored value that indicates a state of a module during a last processing immediately before the new processing, and a basic operation parameter output part that uses the learning algorithm to output an initial value of a basic operation parameter for controlling an operation of the module.
公开/授权文献
- US20200312616A1 ION BEAM IRRADIATION APPARATUS AND PROGRAM THEREFOR 公开/授权日:2020-10-01
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