公开(公告)号：US11955311B2

公开(公告)日：2024-04-09

申请号：US17835875

申请日：2022-06-08

申请人： NISSIN ION EQUIPMENT CO., LTD.

发明人： Shinya Takemura

IPC分类号： H01J37/08 ,  G06N20/00 ,  H01J37/304 ,  H01J37/305 ,  H01J37/317

CPC分类号： H01J37/3056 ,  G06N20/00 ,  H01J37/08 ,  H01J37/304 ,  H01J37/3171

摘要： An ion beam irradiation apparatus includes modules for generating an ion beam according to a recipe, and a control device. The control device receives the recipe including a processing condition for new processing, reads, from a monitored value storage, a monitored value that indicates a state of a module during a last processing immediately before the new processing, inputs the processing condition and the monitored value to a trained machine learning algorithm and receives, as an output from the trained machine learning algorithm, an initial value for the module, and outputs the initial value to the module to set up the module for generating the ion beam.

公开(公告)号：US11462385B2

公开(公告)日：2022-10-04

申请号：US16801689

申请日：2020-02-26

申请人： NISSIN ION EQUIPMENT CO., LTD.

发明人： Shinya Takemura

IPC分类号： H01J37/302 ,  H01J37/08 ,  G06N20/00 ,  G06N5/04

摘要： An ion beam irradiation apparatus includes modules for generating an ion beam meeting a processing condition, and a machine learning part that generates a learning algorithm using, as an explanatory variable, a processing condition during new processing and a monitored value that indicates a state of a module during a last processing immediately before the new processing, and a basic operation parameter output part that uses the learning algorithm to output an initial value of a basic operation parameter for controlling an operation of the module.

公开(公告)号：US20220301817A1

公开(公告)日：2022-09-22

申请号：US17835875

申请日：2022-06-08

申请人： Nissin Ion Equipment Co., Ltd.

发明人： Shinya Takemura

IPC分类号： H01J37/305 ,  H01J37/08 ,  G06N20/00 ,  H01J37/304 ,  H01J37/317

摘要： An ion beam irradiation apparatus includes modules for generating an ion beam according to a recipe, and a control device. The control device receives the recipe including a processing condition for new processing, reads, from a monitored value storage, a monitored value that indicates a state of a module during a last processing immediately before the new processing, inputs the processing condition and the monitored value to a trained machine learning algorithm and receives, as an output from the trained machine learning algorithm, an initial value for the module, and outputs the initial value to the module to set up the module for generating the ion beam.