Invention Grant
- Patent Title: Bonding through multi-shot laser reflow
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Application No.: US17034917Application Date: 2020-09-28
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Publication No.: US11462507B2Publication Date: 2022-10-04
- Inventor: Wei-Yu Chen , Chia-Shen Cheng , Hao-Jan Pei , Philip Yu-Shuan Chung , Kuei-Wei Huang , Yu-Peng Tsai , Hsiu-Jen Lin , Ching-Hua Hsieh , Chen-Hua Yu , Chung-Shi Liu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Slater Matsil, LLP
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L23/31 ; H01L23/498 ; H01L21/56

Abstract:
A method includes performing a first laser shot on a first portion of a top surface of a first package component. The first package component is over a second package component, and a first solder region between the first package component and the second package component is reflowed by the first laser shot. After the first laser shot, a second laser shot is performed on a second portion of the top surface of the first package component. A second solder region between the first package component and the second package component is reflowed by the second laser shot.
Public/Granted literature
- US20210013173A1 Bonding Through Multi-Shot Laser Reflow Public/Granted day:2021-01-14
Information query
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