- 专利标题: Method for making carbon nanotubes
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申请号: US16839328申请日: 2020-04-03
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公开(公告)号: US11465904B2公开(公告)日: 2022-10-11
- 发明人: Jiang-Tao Wang , Peng Liu , Kai-Li Jiang , Shou-Shan Fan
- 申请人: Tsinghua University , HON HAI PRECISION INDUSTRY CO., LTD.
- 申请人地址: CN Beijing; TW New Taipei
- 专利权人: Tsinghua University,HON HAI PRECISION INDUSTRY CO., LTD.
- 当前专利权人: Tsinghua University,HON HAI PRECISION INDUSTRY CO., LTD.
- 当前专利权人地址: CN Beijing; TW New Taipei
- 代理机构: ScienBiziP, P.C.
- 优先权: CN201710349116.X 20170517
- 主分类号: C01B32/162
- IPC分类号: C01B32/162 ; C01B32/159 ; C01B32/16 ; B82Y30/00 ; H01L51/00 ; B82Y40/00 ; H01L51/05
摘要:
A method of making carbon nanotubes is provided, the method includes depositing a catalyst layer on a substrate, placing the substrate having the catalyst layer in a reaction furnace, heating the reaction furnace to a predetermined temperature, introducing a carbon source gas and a protective gas into the reaction furnace to grow a first carbon nanotube segment structure comprising a plurality of metallic carbon nanotube segments, and applying a pulsed electric field to grow a second carbon nanotube segment structure from the plurality of metallic carbon nanotube segments, where the pulsed electric field is a periodic electric field including a plurality of positive electric field pulses and a plurality of negative electric field pulses alternately arranged, and the second carbon nanotube segment structure includes a plurality of semiconducting carbon nanotube segments.
公开/授权文献
- US20200231442A1 METHOD FOR MAKING CARBON NANOTUBES 公开/授权日:2020-07-23
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