发明授权
- 专利标题: Salt, acid generator, resist composition and method for producing resist pattern
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申请号: US17166303申请日: 2021-02-03
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公开(公告)号: US11467490B2公开(公告)日: 2022-10-11
- 发明人: Tatsuro Masuyama , Yukako Anryu , Koji Ichikawa
- 申请人: SUMITOMO CHEMICAL COMPANY, LIMITED
- 申请人地址: JP Tokyo
- 专利权人: SUMITOMO CHEMICAL COMPANY, LIMITED
- 当前专利权人: SUMITOMO CHEMICAL COMPANY, LIMITED
- 当前专利权人地址: JP Tokyo
- 代理机构: Buchanan Ingersoll & Rooney PC
- 优先权: JPJP2020-018904 20200206
- 主分类号: G03F7/004
- IPC分类号: G03F7/004 ; C08F212/14 ; C08F220/18 ; C07C309/06 ; C07C309/17 ; C07C381/12 ; C07D307/00 ; C07D321/10 ; C07D327/04
摘要:
Disclosed are a salt represented by formula (I), and an acid generator and a resist composition which include the same: wherein R1 represents a fluorine atom or a fluorinated alkyl group; R2, R3 and R4 each represent a halogen atom, a fluorinated alkyl group or a hydrocarbon group; m2 and m3 represent an integer of 0 to 4; m4 represents an integer of 0 to 5; Q1 and Q2 each represent a fluorine atom or a perfluoroalkyl group; L1 represents a saturated hydrocarbon group, —CH2- included in the group may be replaced by —O— or —CO—, and a hydrogen atom included in the group may be substituted with a fluorine atom or a hydroxy group; Y1 represents a methyl group which may have a substituent or an alicyclic hydrocarbon group which may have a substituent.
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