Invention Grant
- Patent Title: Bulk acoustic wave resonator
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Application No.: US15812842Application Date: 2017-11-14
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Publication No.: US11476826B2Publication Date: 2022-10-18
- Inventor: Won Han , Dae Ho Kim , Yong Suk Kim , Seung Hun Han , Moon Chul Lee , Chang Hyun Lim , Sung Jun Lee , Sang Kee Yoon , Tae Yoon Kim , Sang Uk Son
- Applicant: Samsung Electro-Mechanics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: NSIP Law
- Priority: KR10-2017-0008171 20170117,KR10-2017-0062807 20170522
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/17 ; H03H9/13 ; H03H3/02

Abstract:
A bulk acoustic wave resonator includes: a substrate; a membrane layer forming a cavity together with the substrate; a lower electrode disposed on the membrane layer; a piezoelectric layer disposed on a flat surface of the lower electrode; and an upper electrode covering a portion of the piezoelectric layer and exposing a side of the piezoelectric layer to air, wherein the piezoelectric layer includes a step portion extended from the side of the piezoelectric layer and disposed on the flat surface of the lower electrode.
Public/Granted literature
- US20180205360A1 BULK ACOUSTIC WAVE RESONATOR Public/Granted day:2018-07-19
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