- 专利标题: Methods and devices for microelectromechanical resonators
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申请号: US16369757申请日: 2019-03-29
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公开(公告)号: US11479460B2公开(公告)日: 2022-10-25
- 发明人: Vamsy Chodavarapu , George Xereas
- 申请人: Stathera IP Holdings Inc.
- 申请人地址: CA Montreal
- 专利权人: Stathera IP Holdings Inc.
- 当前专利权人: Stathera IP Holdings Inc.
- 当前专利权人地址: CA Montreal
- 代理机构: Lee Sullivan Shea & Smith LLP
- 主分类号: B81C1/00
- IPC分类号: B81C1/00 ; H03H3/007 ; H03H9/24 ; B81B7/00 ; G01L9/12 ; H03H9/05 ; G01L9/00 ; H03H9/10
摘要:
MEMS based sensors, particularly capacitive sensors, potentially can address critical considerations for users including accuracy, repeatability, long-term stability, ease of calibration, resistance to chemical and physical contaminants, size, packaging, and cost effectiveness. Accordingly, it would be beneficial to exploit MEMS processes that allow for manufacturability and integration of resonator elements into cavities within the MEMS sensor that are at low pressure allowing high quality factor resonators and absolute pressure sensors to be implemented. Embodiments of the invention provide capacitive sensors and MEMS elements that can be implemented directly above silicon CMOS electronics.