Invention Grant
- Patent Title: Interconnect structure with air-gaps
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Application No.: US17144592Application Date: 2021-01-08
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Publication No.: US11495539B2Publication Date: 2022-11-08
- Inventor: Tai-I Yang , Cheng-Chi Chuang , Yung-Chih Wang , Tien-Lu Lin
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L23/528
- IPC: H01L23/528 ; H01L21/768 ; H01L23/532 ; H01L23/522

Abstract:
The present disclosure, in some embodiments, relates to an integrated chip. The integrated chip includes a first interconnect wire arranged within an inter-level dielectric (ILD) layer and a second interconnect wire arranged within the ILD layer. A dielectric material continuously extends over the first interconnect wire and the ILD layer. The dielectric material is further disposed between sidewalls of the first interconnect wire and one or more air-gaps arranged along opposing sides of the first interconnect wire. A via is disposed over the second interconnect wire and extends through the dielectric material. A second ILD layer is disposed on the dielectric material and surrounds the via.
Public/Granted literature
- US20210159175A1 INTERCONNECT STRUCTURE WITH AIR-GAPS Public/Granted day:2021-05-27
Information query
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