Invention Grant
- Patent Title: Three-dimensional memory device with high mobility channels and nickel aluminum silicide or germanide drain contacts and method of making the same
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Application No.: US16984950Application Date: 2020-08-04
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Publication No.: US11495613B2Publication Date: 2022-11-08
- Inventor: Ashish Baraskar , Raghuveer S. Makala , Peter Rabkin
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Agency: The Marbury Law Group PLLC
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L23/522 ; H01L27/11565 ; H01L27/1157

Abstract:
A memory device can include a strained single-crystalline silicon layer and an alternating stack of insulating layers and electrically conductive layers located over the strained single-crystalline silicon layer. A memory opening fill structure extending through the alternating stack may include an epitaxial silicon-containing pedestal channel portion, and a vertical semiconductor channel, and a vertical stack of memory elements located adjacent to the vertical semiconductor channel Additionally or alternatively, a drain region can include a semiconductor drain portion and a nickel-aluminum-semiconductor alloy drain portion.
Public/Granted literature
- US2708903A Writing instruments of the ball tip type Public/Granted day:1955-05-24
Information query
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