- 专利标题: Device and method of very high density routing used with embedded multi-die interconnect bridge
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申请号: US16322423申请日: 2016-09-30
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公开(公告)号: US11508662B2公开(公告)日: 2022-11-22
- 发明人: Robert Alan May , Wei-Lun Kane Jen , Jonathan L. Rosch , Islam A. Salama , Kristof Darmawikarta
- 申请人: Intel Corporation
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Schwabe, Williamson & Wyatt P.C.
- 国际申请: PCT/US2016/054739 WO 20160930
- 国际公布: WO2018/063316 WO 20180405
- 主分类号: H01L23/538
- IPC分类号: H01L23/538 ; H01L25/065 ; H01L23/00 ; H01L21/683 ; H01L21/48 ; H01L25/00
摘要:
A device and method for providing enhanced bridge structures is disclosed. A set of conducting and insulating layers are deposited and lithographically processed. The conducting layers have uFLS routing. A bridge with uFLS contacts and die disposed on the underlying structure such that the die are connected with the uFLS contacts and uFLS routing. For core-based structures, the layers are formed after the bridge is placed on the underlying structure and the die connected to the bridge through intervening conductive layers. For coreless structures, the layers are formed over the bridge and carrier, which is removed prior to bonding the die to the bridge, and the die bonded directly to the bridge.
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