Invention Grant
- Patent Title: In-situ annealing and etch back steps to improve exchange stiffness in cobalt iron boride based perpendicular magnetic anisotropy free layers
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Application No.: US16686542Application Date: 2019-11-18
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Publication No.: US11527707B2Publication Date: 2022-12-13
- Inventor: Stephen L. Brown , Guohan Hu , Jonathan Z. Sun , Daniel C. Worledge
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Daniel Morris
- Main IPC: H01L43/02
- IPC: H01L43/02 ; H01L43/10 ; H01L43/12 ; H01L43/08 ; H01L27/22

Abstract:
A method for forming a memory device that includes providing a free layer of an alloy of cobalt (Co), iron (Fe) and boron (B) overlying a reference layer; and forming metal layer comprising a boron (B) sink composition atop the free layer. Boron (B) may be diffused from the free layer to the metal layer comprising the boron sink composition. At least a portion of the metal layer including the boron (B) sink composition is removed. A metal oxide is formed atop the free layer. The free layer may be a crystalline cobalt and iron alloy. An interface between the metal oxide and free layer can provide perpendicular magnetic anisotropy character.
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