Invention Grant
- Patent Title: Memory array including dummy regions
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Application No.: US17064279Application Date: 2020-10-06
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Publication No.: US11532343B2Publication Date: 2022-12-20
- Inventor: Bo-Feng Young , Sai-Hooi Yeong , Chao-I Wu , Sheng-Chen Wang , Yu-Ming Lin
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Slater Matsil, LLP
- Main IPC: G11C11/22
- IPC: G11C11/22 ; H01L27/11597 ; H01L27/1159 ; H01L27/11587 ; H01L27/11582

Abstract:
3D memory arrays including dummy conductive lines and methods of forming the same are disclosed. In an embodiment, a memory array includes a ferroelectric (FE) material over a semiconductor substrate, the FE material including vertical sidewalls in contact with a word line; an oxide semiconductor (OS) layer over the FE material, the OS layer contacting a source line and a bit line, the FE material being between the OS layer and the word line; a transistor including a portion of the FE material, a portion of the word line, a portion of the OS layer, a portion of the source line, and a portion of the bit line; and a first dummy word line between the transistor and the semiconductor substrate, the FE material further including first tapered sidewalls in contact with the first dummy word line.
Public/Granted literature
- US20210407569A1 Memory Array Including Dummy Regions Public/Granted day:2021-12-30
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