Invention Grant
- Patent Title: ESD structure and semiconductor structure
-
Application No.: US16996986Application Date: 2020-08-19
-
Publication No.: US11532607B2Publication Date: 2022-12-20
- Inventor: Chun-Chia Hsu , Tung-Heng Hsieh , Yung-Feng Chang , Bao-Ru Young , Jam-Wem Lee , Chih-Hung Wang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: McClure, Qualey & Rodack, LLP
- Main IPC: H01L27/02
- IPC: H01L27/02 ; H01L29/06 ; H01L29/861

Abstract:
Electrostatic discharge (ESD) structures are provided. An ESD structure includes a semiconductor substrate, a first epitaxy region with a first type of conductivity over the semiconductor substrate, a second epitaxy region with a second type of conductivity over the semiconductor substrate, and a plurality of first semiconductor layers and a plurality of second semiconductor layers. The first semiconductor layers and the second semiconductor layers are alternatingly stacked over the semiconductor substrate and between the first and second epitaxy regions. Each of the first and second semiconductor layers has a first side contacting the first epitaxy region and a second side contacting the second epitaxy region, and the first side is opposite the second side.
Public/Granted literature
- US20220059524A1 ESD STRUCTURE AND SEMICONDUCTOR STRUCTURE Public/Granted day:2022-02-24
Information query
IPC分类: