Invention Grant
- Patent Title: Microfluidic device for continuous ejection of fluids, in particular for ink printing, and related manufacturing process
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Application No.: US16882215Application Date: 2020-05-22
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Publication No.: US11541653B2Publication Date: 2023-01-03
- Inventor: Domenico Giusti , Andrea Nicola Colecchia , Gaetano Santoruvo
- Applicant: STMICROELECTRONICS S.R.L.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group LLP
- Priority: IT102019000007196 20190524
- Main IPC: B41J2/03
- IPC: B41J2/03 ; H01L27/20 ; H01L41/09 ; H01L41/314

Abstract:
A microfluidic device for continuous ejection of fluids includes: a semiconductor body that laterally delimits chambers; an intermediate structure which forms membranes each delimiting a top of a corresponding chamber; and a nozzle body which overlies the intermediate structure. The device includes, for each chamber: a corresponding piezoelectric actuator; a supply channel which traverses the intermediate structure and communicates with the chamber; and a nozzle which traverses the nozzle body and communicates with the supply channel. Each actuator is configured to operate i) in a resting condition such that the pressure of a fluid within the corresponding chamber causes the fluid to pass through the supply channel and become ejected from the nozzle as a continuous stream, and ii) in an active condition, where it causes a deformation of the corresponding membrane and a consequent variation of the pressure of the fluid, causing a temporary interruption of the continuous stream.
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