Invention Grant
- Patent Title: Electrolytic processing jig and electrolytic processing method
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Application No.: US16330812Application Date: 2017-09-11
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Publication No.: US11542627B2Publication Date: 2023-01-03
- Inventor: Tomohisa Hoshino , Masato Hamada
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Pearne & Gordon LLP
- Priority: JPJP2016-198729 20161007
- International Application: PCT/JP2017/032675 WO 20170911
- International Announcement: WO2018/066315 WO 20180412
- Main IPC: C25D17/12
- IPC: C25D17/12 ; H01L21/66 ; H01L21/288 ; C25D17/00 ; C25D21/12

Abstract:
An electrolytic processing jig configured to perform an electrolytic processing on a processing target substrate includes a base body having a flat plate shape; an electrode provided at the base body; three or more terminals provided at the base body, each having elasticity and configured to be brought into contact with a peripheral portion of the processing target substrate; and a detecting unit configured to electrically detect a contact of at least one of the terminals with the processing target substrate.
Public/Granted literature
- US20190218682A1 ELECTROLYTIC PROCESSING JIG AND ELECTROLYTIC PROCESSING METHOD Public/Granted day:2019-07-18
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