Invention Grant
- Patent Title: MEMs inertial sensor with high resistance to stiction
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Application No.: US16898350Application Date: 2020-06-10
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Publication No.: US11543428B2Publication Date: 2023-01-03
- Inventor: Gabriele Gattere , Francesco Rizzini , Alessandro Tocchio
- Applicant: STMICROELECTRONICS S.R.L.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed Intellectual Property Law Group LLP
- Priority: IT102019000009651 20190620
- Main IPC: G01P15/125
- IPC: G01P15/125 ; G01P15/08

Abstract:
An inertial structure is elastically coupled through a first elastic structure to a supporting structure so as to move along a sensing axis as a function of a quantity to be detected. The inertial structure includes first and second inertial masses which are elastically coupled together by a second elastic structure to enable movement of the second inertial mass along the sensing axis. The first elastic structure has a lower elastic constant than the second elastic structure so that, in presence of the quantity to be detected, the inertial structure moves in a sensing direction until the first inertial mass stops against a stop structure and the second elastic mass can move further in the sensing direction. Once the quantity to be detected ends, the second inertial mass moves in a direction opposite to the sensing direction and detaches the first inertial mass from the stop structure.
Information query
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