Invention Grant
- Patent Title: Hybrid control system for workpiece heating
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Application No.: US16443043Application Date: 2019-06-17
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Publication No.: US11545375B2Publication Date: 2023-01-03
- Inventor: James D. Strassner , Bradley M. Pomerleau , D. Jeffrey Lischer , Dawei Sun , Michael Paul Rohrer
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Nields, Lemack & Frame, LLC
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/02 ; G05D23/02 ; G05D23/19

Abstract:
A system and method of heating a workpiece to a desired temperature is disclosed. This system and method consider the physical limitations of the temperature device, such as time lag, temperature offset, and calibration, in creating a hybrid approach that heats the workpiece more efficiently. First, the workpiece is heated using open loop control to heat the workpiece to a threshold temperature. After the threshold temperature is reach, a closed loop maintenance mode is utilized. In certain embodiments, an open loop maintenance mode is employed between the open loop warmup mode and the closed loop maintenance mode. Additionally, a method of calibrating a pyrometer using a contact thermocouple is also disclosed.
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