公开(公告)号：US10249525B2

公开(公告)日：2019-04-02

申请号：US15705031

申请日：2017-09-14

Applicant: Applied Materials, Inc.

Inventor： Jason M. Schaller ,  Michael Paul Rohrer ,  Tuan Anh Nguyen ,  William Tyler Weaver ,  Gregory John Freeman ,  Robert Brent Vopat

IPC: H01L21/68 ,  C23C16/455 ,  C23C16/458 ,  C23C16/52 ,  G05B19/418 ,  H01L21/02 ,  H01L21/687

Abstract: A method and apparatus for of improving processing results in a processing chamber by orienting a substrate support relative to a surface within the processing chamber. The method comprising orienting a supporting surface of a substrate support in a first orientation relative to an output surface of a showerhead, where the first orientation of the supporting surface relative to the output surface is not coplanar, and depositing a first layer of material on a substrate disposed on the supporting surface that is oriented in the first orientation.

公开(公告)号：US11545375B2

公开(公告)日：2023-01-03

申请号：US16443043

申请日：2019-06-17

Applicant: Applied Materials, Inc.

Inventor： James D. Strassner ,  Bradley M. Pomerleau ,  D. Jeffrey Lischer ,  Dawei Sun ,  Michael Paul Rohrer

IPC: H01L21/67 ,  H01L21/02 ,  G05D23/02 ,  G05D23/19

Abstract: A system and method of heating a workpiece to a desired temperature is disclosed. This system and method consider the physical limitations of the temperature device, such as time lag, temperature offset, and calibration, in creating a hybrid approach that heats the workpiece more efficiently. First, the workpiece is heated using open loop control to heat the workpiece to a threshold temperature. After the threshold temperature is reach, a closed loop maintenance mode is utilized. In certain embodiments, an open loop maintenance mode is employed between the open loop warmup mode and the closed loop maintenance mode. Additionally, a method of calibrating a pyrometer using a contact thermocouple is also disclosed.